Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays

✍ Scribed by Flewitt, A.J.; Milne, W.I.

• Book ID: 118694980
• Publisher: IEEE
• Year: 2005
• Tongue: English
• Weight: 625 KB
• Volume: 93
• Category: Article
• ISSN: 0018-9219
• DOI: 10.1109/jproc.2005.851533