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Low-Temperature deposition of dielectric films by microwave plasma enhanced decomposition of hexamethyldisilazane

✍ Scribed by S. K. Ray; C. K. Maiti; N. B. Chakrabarti

Book ID: 112900892
Publisher: Springer US
Year: 1991
Tongue: English
Weight: 645 KB
Volume: 20
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02816031

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