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Low-temperature crystallization of thin nickel films under the action of atomic hydrogen

โœ Scribed by E. L. Zhavzharov; G. A. Byalik; V. M. Matyushin

Book ID
111449777
Publisher
SP MAIK Nauka/Interperiodica
Year
2007
Tongue
English
Weight
281 KB
Volume
33
Category
Article
ISSN
1063-7850

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๐Ÿ“œ SIMILAR VOLUMES

Microwave-induced low-temperature crysta
Microwave-induced low-temperature crystallization of amorphous Si thin films
โœ Jin Hyung Ahn; Jeong No Lee; Yoon Chang Kim; Byung Tae Ahn ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 158 KB

Microwave heating was utilized for low-temperature crystallization of amorphous Si (a-Si) films. Microwave heating lowered the annealing temperature and reduced the annealing time. By microwave heating the hydrogen in the amorphous films was diffused out long before the nucleation of polycrystalline