Low-temperature anneal of the divacancy in p-type silicon: A transformation from V2 to VxOy complexes?

✍ Scribed by Trauwaert, M.-A.; Vanhellemont, J.; Maes, H. E.; Van Bavel, A.-M.; Langouche, G.; Clauws, P.

• Book ID: 127242850
• Publisher: American Institute of Physics
• Year: 1995
• Tongue: English
• Weight: 245 KB
• Volume: 66
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.114276