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Low temperature amorphous growth of semiconducting Y–Ba–Cu–O oxide thin films in view of infrared bolometric detection

✍ Scribed by Vishal S. Jagtap; Annick F. Dégardin; Alain J. Kreisler


Book ID
113937399
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
501 KB
Volume
520
Category
Article
ISSN
0040-6090

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✍ Aiguo Feng; Li Luo; J. Martin; C.J. Maggiore 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 565 KB

A temperature-controlled chemical vapor deposition (TC-CVD) process was developed for in-situ growth of highly c-axis orientated YtBa2Cu30~+x (YBCO) thin films directly on sapphire substrates. This new CVD process, for the first time, uses programmable temperature controllers to optimize and tailor