A 2 Â 2 thermo-optic (TO) Mach-Zehnder (MZ) switch based on silicon waveguides with large cross section was designed and fabricated on silicon-on-insulator (SOI) wafer. The multi-mode interferometers (MMI) were used as power splitter and combiner in MZ structure. In order to get smooth interface, an
✦ LIBER ✦
Low switching power 2 × 2 thermo-optic switch using direct ultraviolet photolithography process
✍ Scribed by Lei Gao; Jie Sun; Xiaoqiang Sun; Caiping Kang; Yunfei Yan; Daming Zhang
- Book ID
- 108231815
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 457 KB
- Volume
- 282
- Category
- Article
- ISSN
- 0030-4018
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