Fabrication and analysis of 2 × 2 thermo-optic SOI waveguide switch with low power consumption and fast response by anisotropy chemical etching

Low power 2 × 2 thermo-optic S

Low power 2 × 2 thermo-optic SOI waveguide switch fabricated by anisotropy chemical etching

✍ Jinsong Xia; Jinzhong Yu; Zhangtao Wang; Zhongchao Fan; Shaowu Chen 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 287 KB

A 2 Â 2 thermo-optic (TO) Mach-Zehnder (MZ) switch based on silicon waveguides with large cross section was designed and fabricated on silicon-on-insulator (SOI) wafer. The multi-mode interferometers (MMI) were used as power splitter and combiner in MZ structure. In order to get smooth interface, an

Fabrication and analysis of 2&#xa0;×&#xa0;2 thermo-optic SOI waveguide switch with low power consumption and fast response by anisotropy chemical etching

Fabrication and analysis of 2 × 2 thermo-optic SOI waveguide switch with low power consumption and fast response by anisotropy chemical etching