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Low-stress indiumâtinâoxide thin films rf magnetron sputtered on polyester substrates

✍ Scribed by Carcia, P. F.; McLean, R. S.; Reilly, M. H.; Li, Z. G.; Pillione, L. J.; Messier, R. F.

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Low-stress indiumâtinâoxide thin films rf magnetron sputtered on polyester substrates