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Low resistivity CdS thin films grown by r.f. sputtering in an Ar-H2 atmosphere

✍ Scribed by N. Romeo; A. Bosio; V. Canevari; D. Seuret


Publisher
Elsevier Science
Year
1987
Weight
250 KB
Volume
22
Category
Article
ISSN
0379-6787

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CdS Thin Films Prepared by RF Magnetron
✍ Punnoose, A. ;Marafi, M. ;Prabu, G. ;El-Akkad, F. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 162 KB πŸ‘ 2 views

CdS thin films were prepared using rf planar magnetron sputtering in Ar atmosphere. Different deposition temperatures between 150 and 250 C and different rf powers between 30 and 130 W were used. The films had hexagonal structure with crystallites oriented in the h100i direction. The increase of dep