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Low Resistance Ti/Al/Mo/Au Ohmic Contacts for AlGaN/GaN Heterostructure Field Effect Transistors

✍ Scribed by Selvanathan, D. ;Zhou, L. ;Kumar, V. ;Adesida, I.

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 81 KB
Volume: 194
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200212)194:2<583::aid-pssa583>3.0.co;2-3

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