Effect of Various Pre-Treatments on Ti/Al/Ti/Au Ohmic Contacts for AlGaN/GaN HFET Devices

✍ Scribed by Bardwell, J.A. ;Liu, Ying ;Rauhala, S. ;Bouwhuis, P. ;Marshall, P. ;Tang, H. ;Webb, J.B.

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 105 KB
• Volume: 188
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200111)188:1<389::aid-pssa389>3.0.co;2-q