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Low-pressure RF multi-plasma-jet system for deposition of alloy and composite thin films

✍ Scribed by M Šı́cha; Z Hubicka; L Soukup; L Jastrabı́k; M Cada; P Špatenka


Book ID
108422932
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
145 KB
Volume
148
Category
Article
ISSN
0257-8972

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