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Low Pressure CVD of Silicon Nitride from a Silane-Ammonia Mixture : Analysis of Preliminary Experimental and Simulation Results

✍ Scribed by Yacoubi, K.; Azzaro, C.; Couderc, J. P.

No coin nor oath required. For personal study only.

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Analysis and Modeling of Low Pressure CV

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Low-temperature normal-pressure CVD of c

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