Analysis and Modeling of Low Pressure CVD of Silicon Nitride from a Silane-Ammonia Mixture: I. Experimental Study and Determination of a Gaseous Phase Mechanism

✍ Scribed by Yacoubi, Khalid

• Book ID: 121746805
• Publisher: The Electrochemical Society
• Year: 1999
• Tongue: English
• Weight: 523 KB
• Volume: 146
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.1392044