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Low-Pressure Chemical Vapor Deposition of LiCoO[sub 2] Thin Films: A Systematic Investigation of the Deposition Parameters

✍ Scribed by Oudenhoven, J. F. M.; van Dongen, T.; Niessen, R. A. H.; de Croon, M. H. J. M.; Notten, P. H. L.

No coin nor oath required. For personal study only.

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