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Investigation of charge-trapping centers in low-pressure chemical vapor deposition Si3N4 thin films

โœ Scribed by Shin'Ichi Minami; Yoshiaki Kamigaki


Book ID
112079011
Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
989 KB
Volume
78
Category
Article
ISSN
8756-663X

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