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Low-Power RF plasma sources for technological applications: III. helicon plasma sources

✍ Scribed by K. V. Vavilin; A. A. Rukhadze; Kh. M. Ri; V. Yu. Plaksin

Book ID: 110139155
Publisher: Springer
Year: 2004
Tongue: English
Weight: 116 KB
Volume: 49
Category: Article
ISSN: 1063-7842
DOI: 10.1134/1.1767876

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