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Low-loss polymeric optical waveguides using electron-beam direct writing

✍ Scribed by Wong, W. H.; Zhou, J.; Pun, E. Y. B.


Book ID
121305011
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
468 KB
Volume
78
Category
Article
ISSN
0003-6951

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## Abstract Optical waveguides based on benzocyclobutene polymer are fabricated by electron‐beam direct writing without etching. The propagation losses of waveguide measured at 1.55 ΞΌm for both TE and TM polarizations are 0.76 and 0.86 dB/cm, respectively. Moreover, the characteristics of waveguide