A micromachined RF low phase noise volta
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Darrin J. Young; Bernhard E. Boser; Vincent Malba; Anthony F. Bernhardt
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Article
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2001
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John Wiley and Sons
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English
β 702 KB
An RF low phase noise voltage-controlled oscillator is implemented with micromachined IC-compatible variable capacitors and three-dimensional coil inductor. Unlike conventional on-chip passive devices, the micromachined variable capacitors achieve a high-Q value above 60 at 1 GHz with a 15% tuning r