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A micromachined RF low phase noise voltage-controlled oscillator for wireless communications

✍ Scribed by Darrin J. Young; Bernhard E. Boser; Vincent Malba; Anthony F. Bernhardt

Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
702 KB
Volume
11
Category
Article
ISSN
1096-4290

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✦ Synopsis

An RF low phase noise voltage-controlled oscillator is implemented with micromachined IC-compatible variable capacitors and three-dimensional coil inductor. Unlike conventional on-chip passive devices, the micromachined variable capacitors achieve a high-Q value above 60 at 1 GHz with a 15% tuning range for a nominal 2 pF capacitance with 3 V tuning voltage. Three-dimensional inductors minimize the substrate loss and achieve a Q of 30 at 1 GHz with a 4.8 nH inductance. Both passive components are fabricated on silicon substrates and thus amenable to monolithic integration with standard IC process. The prototype VCO exhibits -136 dBc/Hz phase noise at 3 MHz offset frequency from the carrier, suitable for most wireless communication applications, in particular GSM. The VCO is tunable from 855 Mhz to 863 MHz, limited by the test set-up.

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