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Low-energy ion scattering (LEIS) for composition and structure analysis of the outer surface

✍ Scribed by H.H. Brongersma; T.M. Buck

Publisher
Elsevier Science
Year
1978
Weight
540 KB
Volume
149
Category
Article
ISSN
0029-554X

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Low-energy noble-gas ion scattering (LEIS) probes the outermost atomic layer of a material, but a quantitative compositional analysis of this layer is not straightforward. It is demonstrated that quantiÐcation by calibration can be done, assuming that ion fractions and shielding e †ects are the same