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Low Energy Ga+ and Ar+ Ion Milling for Improved EBSD Sample Preparation

โœ Scribed by Michael, JR; Kotula, PG


Book ID
120423978
Publisher
Cambridge University Press
Year
2008
Tongue
English
Weight
997 KB
Volume
14
Category
Article
ISSN
1431-9276

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โœ Lee, Jeong Soo; Jeong, Young Woo; Kim, Sung Tae ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 735 KB

The rocking-angle ion-milling technique has been employed to produce optimum Pt/Ti/SiO,/Si, WITiN/Si021Si, and (Pb,La)TiO,/Pt/MgO samples for cross-sectional transmission electron microscopy (TEM). Because of the different ion-milling rates between film layers and substrate materials, no satisfactor