Improved sample preparation for cross-se
โ
Lee, Jeong Soo; Jeong, Young Woo; Kim, Sung Tae
๐
Article
๐
1996
๐
John Wiley and Sons
๐
English
โ 735 KB
The rocking-angle ion-milling technique has been employed to produce optimum Pt/Ti/SiO,/Si, WITiN/Si021Si, and (Pb,La)TiO,/Pt/MgO samples for cross-sectional transmission electron microscopy (TEM). Because of the different ion-milling rates between film layers and substrate materials, no satisfactor