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Low-energy focused Si ion beam deposition under oxygen atmosphere

✍ Scribed by J Yanagisawa; Y Wang; T Hada; K Murase; K Gamo

Book ID: 114170726
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 166 KB
Volume: 148
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00779-4

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