A low energy ion beam assisted deposition technique for realizing iso-type SiGe/Si hetero-interface diodes

✍ Scribed by S Mohajerzadeh; C.R Selvakumar; D.E Brodie; M.D Robertson; J.M Corbett

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 498 KB
• Volume: 283
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(95)08506-8