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Low-energy 15N implantation in carbon for the synthesis of carbon nitride layers

✍ Scribed by F. Link; H. Baumann; A. Markwitz; E.F. Krimmel; K. Bethge

Book ID: 113287353
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 454 KB
Volume: 113
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01332-6

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