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Loss of hydrogen from ion irradiated photoresist and a-C:H films

✍ Scribed by D.L. Baptista; Irene T.S. Garcia; F.C. Zawislak


Book ID
113822998
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
272 KB
Volume
219-220
Category
Article
ISSN
0168-583X

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