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Ion irradiation effects on a-C:H, a-C:N:H and a-C:F:H films

✍ Scribed by J.R. Galvão; F.P. Luce; D.L. Baptista; M.E.M. Maia da Costa; C.M. Lepienski; F.C. Zawislak

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 173 KB
Volume: 249
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.04.040

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