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Locus of the change in the rate-determining step

✍ Scribed by Reiji Mezaki; Shoichi Oki

Book ID
113174555
Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
165 KB
Volume
30
Category
Article
ISSN
0021-9517

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Fig. 1. Arrhenius plots of the deposition rate at three different precursor feed rates (W r ), total pressure 0.7 torr, argon carrier gas rate 100 sccm. Communications