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Localised modifications of anatase TiO2 thin films by a Focused Ion Beam

✍ Scribed by A. Surpi; E. Göthelid; T. Kubart; D. Martin; J. Jensen


Book ID
108224769
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
827 KB
Volume
268
Category
Article
ISSN
0168-583X

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## Ion implantation Sol-gel Photocatalytic reaction of activated TiO 2 can be directly used for water splitting to produce hydrogen for fuel cell. TiO 2 thin films have been deposited using sol-gel method and subsequently heat-treated at 500 °C to form anatase phase. Ar + or N + ions with energy of