Local strains induced in silicon channel by a periodic array of nitride capped poly lines investigated by high resolution X-ray diffraction

✍ Scribed by Stephanie Escoubas; Helene Brillet; Thomas Mesarotti; Gaetan Raymond; Olivier Thomas; Pierre Morin

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 619 KB
• Volume: 154-155
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2008.08.016