✦ LIBER ✦
High-resolution X-ray diffraction as a tool to investigate the evolution of local stress in sub-micrometric Si lines isolated by periodic arrays of oxide-filled trenches
✍ Scribed by S. Escoubas; M. Eberlein; P. Rohr; O. Thomas
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 466 KB
- Volume
- 12
- Category
- Article
- ISSN
- 1369-8001
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