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Local piezoelectric properties of ZnO thin films prepared by RF-plasma-assisted pulsed-laser deposition method

✍ Scribed by Bdikin, I K; Gracio, J; Ayouchi, R; Schwarz, R; Kholkin, A L


Book ID
120297262
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
884 KB
Volume
21
Category
Article
ISSN
0957-4484

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## Abstract InAs co‐doped ZnO films were grown on sapphire substrates by pulsed laser deposition. The grown films have been characterized using X‐ray diffraction (XRD), Hall effect measurements, Atomic force microscope (AFM) and Field emission scanning electron microscope (FESEM) in order to invest