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Local material removal by focused ion beam milling and etching

✍ Scribed by S. Lipp; L. Frey; G. Franz; E. Demm; S. Petersen; H. Ryssel

Book ID: 113286873
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 476 KB
Volume: 106
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)00778-4

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