✦ LIBER ✦
Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching
✍ Scribed by Thomas Kusserow; Matthias Wulf; Ricardo Zamora; Kelash Kanwar; Hartmut Hillmer
- Book ID
- 119324751
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 695 KB
- Volume
- 102
- Category
- Article
- ISSN
- 0167-9317
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