Lithography [semiconductor mfg]

✍ Scribed by M. Wang

Publisher: Intech
Year: 2010
Tongue: English
Leaves: 676
Category: Library

No coin nor oath required. For personal study only.

✦ Table of Contents

Preface&Contents_Lithography......Page 0
1......Page 9
01_Rhee......Page 11
02_Matsumoto......Page 27
03_Jami......Page 43
04_Nishiyama......Page 51
05_Nosato......Page 67
06_Nikolay......Page 81
07_Qualtieri......Page 125
08_Kim_Sang_Kon......Page 141
2......Page 171
09_Endo......Page 173
10_Braic......Page 189
11_White......Page 213
12_Wang_Linjun......Page 239
3......Page 253
13_Chen_ChiiDong......Page 255
14_Okano......Page 281
15_Lee......Page 293
16_Stepanova......Page 307
17_VutovaPart1......Page 333
18_VutovaPart2......Page 365
4......Page 393
19_Wang......Page 395
20_Kang......Page 419
21_Kim_Dong_Pyo......Page 443
22_Cerf......Page 463
5......Page 473
23_Lan......Page 475
24_Glinsner......Page 513
25_Mekaru......Page 535
26_Yasuda......Page 561
27_Taniguchi......Page 575
28_Alkaisi......Page 589
6......Page 615
29_Matham......Page 617
30_Choi_H_W......Page 635
31_Stelzle......Page 649
32_Chi_Lifeng......Page 665

📜 SIMILAR VOLUMES

Semiconductor Lithography: Principles, P

📁 Semiconductor Lithography: Principles, Practices, and Materials

✍ Wayne M. Moreau (auth.) 📂 Library 📅 1988 🏛 Springer US 🌐 English

<p>Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into micro

Breakdown Phenomena in Semiconductors an

📁 Breakdown Phenomena in Semiconductors and Semiconductor Devices

✍ Michael Levinshtein, Juha Kostamovaara, Sergey Vainshtein 📂 Library 📅 2005 🏛 World Scientific 🌐 English

Impact ionization, avalanche and breakdown phenomena form the basis of many very interesting and important semiconductor devices, such as avalanche photodiodes, avalanche transistors, suppressors, sharpening diodes (diodes with delayed breakdown), as well as IMPATT and TRAPATT diodes. In order to pr

Compound Semiconductors Semiconductor Pr

📁 Compound Semiconductors Semiconductor Properties of Superionic Materials

✍ R. K. Willardson 📂 Library 📅 1988 🏛 Elsevier, Academic Press 🌐 English

Radiation Effects in Semiconductors and

📁 Radiation Effects in Semiconductors and Semiconductor Devices

✍ V. S. Vavilov, N. A. Ukhin (auth.) 📂 Library 📅 1995 🏛 Springer US 🌐 English

Ultrafast Spectroscopy of Semiconductors

📁 Ultrafast Spectroscopy of Semiconductors and Semiconductor Nanostructures

✍ Dr. Jagdeep Shah (auth.) 📂 Library 📅 1996 🏛 Springer Berlin Heidelberg 🌐 English

Ultrafast Spectroscopy of Semiconductors

📁 Ultrafast Spectroscopy of Semiconductors and Semiconductor Nanostructures

✍ Dr. Jagdeep Shah (auth.) 📂 Library 📅 1999 🏛 Springer-Verlag Berlin Heidelberg 🌐 English

<p>This subject is currently one of the most exciting areas of research in condensed-matter physics. Direct investigation of fundamental dynamical processes in semiconductors, exploiting the remarkable recent development of pulses with pulse widths less than 5fs, has led to new insights into fundame