Liquid nitrogen cooled sample stage for scanning electron microscopy using a superconducting YBa2Cu3O7 − δ shield

✍ Scribed by R. Gerber; T. Nissel; H.-G. Wener; A. Willmann; R.P. Huebener; D. Koelle; R. Gross

• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 647 KB
• Volume: 37
• Category: Article
• ISSN: 0011-2275
• DOI: 10.1016/s0011-2275(96)00104-x

✦ Synopsis

We have built a liquid nitrogen cooled low temperature stage for scanning electron microscopes, which is specially designed for the study of high transition temperature (T,) superconducting devices and circuits in very small and stable magnetic fields. For effective magnetic shielding of the sample we use a superconducting cylindric YBa2Cu307_S shield in addition to several Mumetall shields. Samples can be operated in a temperature range between 77 and 130 K while they are directly irradiated by the electron beam. This setup allows the study of local superconducting properties of high T, thin film devices or multilayer circuits on a micrometer scale.