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Liquid-helium stage in a scanning electron microscope

✍ Scribed by P.L. Stöhr; R.P. Huebener


Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
193 KB
Volume
19
Category
Article
ISSN
0011-2275

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✦ Synopsis


A liquid-helium stage to be inserted into a scanning electron microscope (SEM) is described. The sample chamber, which is filled with liquid helium, has a volume of about 8 x 7 x 5 cm 3 Translation of the cooled sample in x, y, and z directions is possible during electron-optical observation. Since mounting the liquid-helium stage to the SEM can be performed in less than 30 min, switching the SEM from regular operation at room temperature to the IovP temperature mode and back is relatively easy. After cooling the system to 4.2 K, a 3 fitre helium reservoir allows experimentation near 4.2 K for about 5 h.


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