✦ LIBER ✦

Linewidth metrology for x-ray masks with subhalfmicron feature size

✍ Scribed by U. Mescheder; F. Mund; H.-L. Huber

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

An x-ray projection method using zone pl

✍ R.E. Burge; M.T. Browne; P. Charalambous 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 430 KB