✦ LIBER ✦
An x-ray projection method using zone plates for mask preparation with sub-micron sizes
✍ Scribed by R.E. Burge; M.T. Browne; P. Charalambous
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 430 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-9317
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