Linewidth measurement on IC wafers by diffraction from grating test patterns : W. A. Bosenberg and H. P. Kleinknecht. Solid St. Technol. 79 (July 1983)

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 122 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)90551-1