Linewidth measurement on IC masks by diffraction from grating test patterns: W. A. Bosenberg and H. P. Kleinknecht Solid St. Technol., 110 (October 1982)

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 89 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(85)80111-7