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Linearization methods of laser interferometers for pico/nano positioning stages

✍ Scribed by Podżorny, Tomasz; Budzyń, Grzegorz; Rzepka, Janusz

Book ID: 123074776
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 925 KB
Volume: 124
Category: Article
ISSN: 0030-4026
DOI: 10.1016/j.ijleo.2013.05.054

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