✦ LIBER ✦
High-precision positioning stage using optical zooming laser interferometer for linear encoder calibration
✍ Scribed by Mariko Kajima; Kaoru Minoshima
- Book ID
- 107662287
- Publisher
- Korean Society for Precision Engineering
- Year
- 2010
- Tongue
- English
- Weight
- 292 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1229-8557
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