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Linear position detector with rod shape electromagnet

โœ Scribed by Kano, Y.; Hasebe, S.; Huang, C.; Yamada, T.; Inubuse, M.


Book ID
114546678
Publisher
IEEE
Year
1990
Tongue
English
Weight
190 KB
Volume
26
Category
Article
ISSN
0018-9464

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Magnetically driven linear micro-actuators with 1 mN output force and hundreds of microns of total travel have been realized using LIGAlike processing techniques. These devices are driven at resonance frequencies of around 350 Hz and exhibit quality factors of about 300 in air. Exploiting wire-wound