Electromagnetic linear actuators with in
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H Guckel; T Earles; J Klein; J.D Zook; T Ohnstein
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Article
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1996
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Elsevier Science
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English
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Magnetically driven linear micro-actuators with 1 mN output force and hundreds of microns of total travel have been realized using LIGAlike processing techniques. These devices are driven at resonance frequencies of around 350 Hz and exhibit quality factors of about 300 in air. Exploiting wire-wound