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Limits of spatial and compositional resolution of electron energy loss spectroscopy of soft materials

โœ Scribed by Sergey Yakovlev; Nitash P. Balsara; Kenneth H. Downing

Book ID
113940587
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
428 KB
Volume
116
Category
Article
ISSN
0304-3991

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Practical spatial resolution of electron
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โœ A.B. Shah; Q.M. Ramasse; J.G. Wen; A. Bhattacharya; J.M. Zuo ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 778 KB

The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolu