Lift-off technique of homoepitaxial CVD diamond films by deep implantation and selective etching

✍ Scribed by Locher, R.; Behr, D.; Güllich, H.; Herres, N.; Koidl, P.; Samlenski, R.; Brenn, R.

• Book ID: 121889021
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 892 KB
• Volume: 6
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(96)00662-0