LEC GaAs by multiple wafer annealing for IC and microwave applications

High-performance integrated passive tech

High-performance integrated passive technology by advanced SI-GaAs-based fabrication for RF and microwave applications

✍ Cong Wang; Ji-Hoon Lee; Nam-Young Kim 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 387 KB

## Abstract In this letter, an advanced SI‐GaAs‐based manufacturing process is presented for creating high quality, cost effective, and compact size integrated passive devices. Through this advanced process, accurate thin film resistors, high Q spiral inductors, and high yield/breakdown voltage met