✦ LIBER ✦
High-performance integrated passive technology by advanced SI-GaAs-based fabrication for RF and microwave applications
✍ Scribed by Cong Wang; Ji-Hoon Lee; Nam-Young Kim
- Publisher
- John Wiley and Sons
- Year
- 2010
- Tongue
- English
- Weight
- 387 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0895-2477
No coin nor oath required. For personal study only.
✦ Synopsis
Abstract
In this letter, an advanced SI‐GaAs‐based manufacturing process is presented for creating high quality, cost effective, and compact size integrated passive devices. Through this advanced process, accurate thin film resistors, high Q spiral inductors, and high yield/breakdown voltage metal‐insulator‐metal capacitors can be successfully realized. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 618–623, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25018