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Leak detection methods for glass capped and polymer sealed MEMS packaging

✍ Scribed by Suzanne Millar; Marc P. Y. Desmulliez; Stewart McCracken

Book ID: 106186051
Publisher: Springer-Verlag
Year: 2011
Tongue: English
Weight: 343 KB
Volume: 17
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-010-1200-z

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