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Layer-by-Layer Interference Lithography of Three-dimensional Microstructures in SU-8

✍ Scribed by Andrés F. Lasagni; Dajun Yuan; Suman Das

Publisher: John Wiley and Sons
Year: 2009
Tongue: English
Weight: 328 KB
Volume: 11
Category: Article
ISSN: 1438-1656
DOI: 10.1002/adem.200800382

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